Dielectrophoretic assembly and integration of nanowire devices with functional CMOS operating circuitry
نویسندگان
چکیده
We present a novel platform for the development and deployment of nanosensors in integrated systems. The nanosensor technology is based on ‘‘striped’’ high aspect ratio cylindrical structures grown using porous membranes as templates. These nanostructures are manipulated using dielectrophoretic forces, allowing their individual assembly and characterization. This assembly also enables the development of ‘‘mixed-mode’’ integrated circuits that include readout, signal processing, and communications circuitry, as well as the requisite layout for the post-IC assembly of the nanostructures. We report on preliminary designs of such mixed mode systems whose layouts integrate dielectrophoretic assembly sites with a rudimentary resistance read-out circuitry. 2004 Published by Elsevier B.V.
منابع مشابه
High-yield self-limiting single-nanowire assembly with dielectrophoresis.
Single-crystal nanowire transistors and other nanowire-based devices could have applications in large-area and flexible electronics if conventional top-down fabrication techniques can be integrated with high-precision bottom-up nanowire assembly. Here, we extend dielectrophoretic nanowire assembly to achieve a 98.5% yield of single nanowires assembled over 16,000 patterned electrode sites with ...
متن کاملLarge-scale, heterogeneous integration of nanowire arrays for image sensor circuitry.
We report large-scale integration of nanowires for heterogeneous, multifunctional circuitry that utilizes both the sensory and electronic functionalities of single crystalline nanomaterials. Highly ordered and parallel arrays of optically active CdSe nanowires and high-mobility Ge/Si nanowires are deterministically positioned on substrates, and configured as photodiodes and transistors, respect...
متن کاملPrecise Placement of Metallic Nanowires on a Substrate by Localized Electric Fields and Inter-Nanowire Electrostatic Interaction
Placing nanowires at the predetermined locations on a substrate represents one of the significant hurdles to be tackled for realization of heterogeneous nanowire systems. Here, we demonstrate spatially-controlled assembly of a single nanowire at the photolithographically recessed region at the electrode gap with high integration yield (~90%). Two popular routes, such as protruding electrode tip...
متن کاملSUNFEST REU Program DIELECTROPHORETIC ASSEMBLY, INTEGRATION, AND CHARACTERIZATION OF FUNCTIONAL NANOSTRUCTURES
Nano-electro-mechanical systems (NEMS) are pivotal to integrated systems research. The ability to integrate sensors and processors on a single wafer has the potential to create highly sensitive and complex systems that respond to changing environmental stimuli. This project focuses on the assembly, integration, and characterization of both nanowires and nanotubes used in NEMS devices. Using die...
متن کاملDielectrophoretic assembly of nanowires.
Nanowire (NW) assembly is currently of great interest, partly because NWs are considered as a fundamental component in the fabrication of a variety of devices. A powerful method has been developed to model the assembly of NWs. The three-dimensional dielectrophoretic (DEP) assembly of NWs across opposing electrodes is, for the first time, comprehensively studied using this new method. It is foun...
متن کامل